Item # A-322 Plus, A-322 PIglide HS Planar Scanning Stages with Air Bearing On PI (Physik Instrumente) L.P.

PI - Motion Control & Nanopositioning Solutions


Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics / Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods / Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Search Catalog



	All Categories A-322 PIglide HS Planar Scanning Stages with Air Bearing

All Categories > A-322 PIglide HS Planar Scanning Stages with Air Bearing > Item # A-322 Plus


	Item # A-322 Plus, A-322 PIglide HS Planar Scanning Stages with Air Bearing

A-322 PIglide HS Planar Scanning Stages with Air Bearing

larger image

Ideal for scanning applications or high-precision positioning
Cleanroom compatible
Three performance classes: Base, Plus, and Ultra
PIglide reference-class XY positioning system
The PIglide HS planar scanner has magnetic linear motors, vacuum preload, and an absolute encoder: Contact- and friction-free motion for the highest accuracy and reliability.
The positioning system was designed to maximize the throughput and ensure the highest precision. Flexible coupling of the bridge axis to the gantry axis allows lateral decoupling without sacrificing the stiffness of the system.
The A-322 is coupled with industry-leading controllers and drive modules from ACS that offer superior servo performance, advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools.
The A-322 series is a starting point for further adaptations. Critical core components such as linear motors, measuring systems, and air bearing assemblies have already been developed, tested, and have proven their capabilities. Depending on the application and requirements of the customer, a variant of the A-322 series forms the ideal starting point for a tailor-made, ultraprecise solution.
Absolute encoder
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
PIMag® magnetic direct drive
3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
Long lifetime, cleanroom compatible drag chains
The A-322 has high-quality, long-lasting ribbon cables and pneumatic hoses. Extensive research and development has resulted in an optimized cable management system that enables millions of maintenance-free cycles. Teflon coating ensures low particle formation.
Application fields
PIglide positioning systems are ideally suited for many high-precision applications, such as metrology, photonics, and precision scanning as well as in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

Specifications

Precision/Dynamics		Standard/High

Travel Range, Bridge Axis		350; 500 mm

Travel Range, Gantry Axis		350; 500; 750 mm

Size of the Motion Platform		250 x 268 mm

Guide		Air bearing, with vacuum preload

Integrated Sensor		Absolute linear encoder, BiSS-C, Invar measuring scale

Sensor Resolution		1 nm

Load Capacity		20 kg

Bidirectional Repeatability		±0.1 µm

Positioning Accuracy, Calibrated		±0.35 µm

Straightness		1 µm

Flatness		2 µm

Pitch		10 µrad

Yaw		2 µrad

XY Orthogonality		5 µrad

Max. Velocity (Unloaded)		1 m/s

Max. Acceleration (Unloaded)		20 m/s²

Position Stability		±30 nm

Moved Mass (Bridge Axis)		14 kg

Moved Mass (Gantry Axis)		Depending on the travel range of the bridge axis: 350 mm: 53 kg, 500 mm: 56 kg

Number of Motors		1x bridge, 2x gantry axis

Nominal Voltage (DC)		70/70 V

Peak Voltage (DC)		300/300 V

Nominal Force		140/140 N

Peak Force		480/480 N

Force Constant (RMS)		27.5/27.5 N·m

Nominal Current (RMS)		5.1/5.1 A

Peak Current (RMS)		17.5/17.5 A

Back EMF Phase to Phase		22.5/22.5 V·s/m

Resistance Phase to Phase		2.6/2.6 O

Inductance Phase to Phase		2.0/2.0 mH

Cooling System		Water, 20ºC, 2 to 3 l/min

Operating Pressure		550 ±35 kPa 80 ±5 psi

Air Consumption		With external vacuum supply: 56 l/min (2 SCFM) With internally generated vacuum: 112 l/min (4 SCFM)

Vacuum		74.66 kPa 560 mmHg 14 L/min 0.5 scfm

Air Quality		Clean (filtered to 1.0 µm or better) - ISO 8573-1 Class 1 Dry (-15 ºC dew point) - ISO 8573-1 Class 3 Oil free - ISO 8573-1 Class 1

Materials		Granite Base Hardcoat Aluminum Mounting Hardware made of Stainless Steel Nickel-Plated Steel Side Rails

3 Performance and Price Classes		Base: XY gantry design with 3 standard linear motors. Plus: XY gantry design with 3 liquid-cooled, high-performance linear motors. For applications with a high duty cycle and high accelerations. Ultra: XY gantry design with 4 liquid-cooled, high-performance linear motors. Both the X and the Y axis have 2 linear motors and 2 linear encoders each. This design improves the positioning accuracy, repeatability, and error compensation, in particular for loads with large dimensions.

Accessories and Options		PIglide Filter and Air Preparation Kits Additional axes Machine bases Base plates made of granite and systems for reducing vibration Suitable mounts for additional positioners such as tip/tilt platforms or 6-axis positioners with piezo drives.

Note		Assumes an air bearing operating pressure of 550 kPa. The payload center of gravity may not be more than 50 mm away from the surface of the motion platform. Overall weight depends on the customer-specific granite base. Values serve as examples for a travel range of 500 mm x 500 mm. Contact PI for the exact specifications for other travel ranges.

CADs & Drawings, Manuals, Videos, Specs


		CADs & Drawings, Manuals, Videos, Specs

Item # A-322 Plus, A-322 PIglide HS Planar Scanning Stages with Air Bearing

Precision/Dynamics

Travel Range, Bridge Axis

Travel Range, Gantry Axis

Size of the Motion Platform

Guide

Integrated Sensor

Sensor Resolution

Load Capacity

Bidirectional Repeatability

Positioning Accuracy, Calibrated

Straightness

Flatness

Pitch

Yaw

XY Orthogonality

Max. Velocity (Unloaded)

Max. Acceleration (Unloaded)

Position Stability

Moved Mass (Bridge Axis)

Moved Mass (Gantry Axis)

Number of Motors

Nominal Voltage (DC)

Peak Voltage (DC)

Nominal Force

Peak Force

Force Constant (RMS)

Nominal Current (RMS)

Peak Current (RMS)

Back EMF Phase to Phase

Resistance Phase to Phase

Inductance Phase to Phase

Cooling System

Operating Pressure

Air Consumption

Vacuum

Air Quality

Materials

3 Performance and Price Classes

Accessories and Options

Note