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 All Categories    Ceramic Linear Motors: PILine Ultrasonic Motors, Nexline PiezoWalk Nano-Drivers
All Categories > Micropositioning:
Motorized Stages, Hexapods, Controllers
> Ceramic Linear Motors: PILine Ultrasonic Motors, Nexline PiezoWalk Nano-Drivers
 
 

Ceramic Linear Motors: PILine Ultrasonic Motors, Nexline PiezoWalk Nano-Drivers


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U-523 PILine® Linear Stages

U-523 PILine® Linear Stages


Compact Linear Stage with Ultrasonic Piezo Motor

Fast positioning

Space-saving and light

High guiding accuracy

Self-locking, no heat generation at rest

Low-noise operation
Q-545 Q-Motion® Precision Linear Stages

Q-545 Q-Motion® Precision Linear Stages

(2)
High Forces and Small Design Due to Piezo Motors

Only 45 mm in width

Incremental sensors with position resolution

XY combinations without adapter plate possible

Vacuum versions to 10-9 hPa available on request
U-723 PILine® XY Stages

U-723 PILine® XY Stages


Compact XY Stage with Ultrasonic Piezo Motors

Fast positioning in 2 axes

Space-saving and light

High guiding accuracy

Self-locking, no heat generation at rest

Low-noise operation
N-331 PICMAWalk Walking Drives

N-331 PICMAWalk Walking Drives

(6)
OEM Walking Drive for Durable Applications with up to 15 mm/s Velocity and up to 50 N Push/Pull Force

Robust and industrially usable walking drive with PICMA® technology for extreme durability

Fastest and strongest drive of its size class

Variable runner lengths from 25 mm to 100 mm

Precise, nanometer precision positioning of loads up to 5 kg

Plug-and-play, thanks to PI proprietary controller technology
N-216 NEXLINE® Linear Actuators

N-216 NEXLINE® Linear Actuators

(4)
Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

Integrated direct-measuring linear encoder with resolution 5 nm

Fields of application
  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Nanometer precision and high feed force ...
Q-521 Q-Motion® Miniature Linear Stages

Q-521 Q-Motion® Miniature Linear Stages

(6)
Smallest Linear Stage with Position Control, High Resolution and Affordable Price

Multi-axis system setups with adapter plate or bracket (available as an option).

Direct position measurement with integrated incremental encoder

Vacuum versions to 10-6 hPa available on request.

Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel range. The inertia drive principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable ...


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