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 All Categories    NanoCube® XYZ Piezo Nanopositioning Systems
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture > NanoCube® XYZ Piezo Nanopositioning Systems > View Items
 

NanoCube® XYZ Piezo Nanopositioning Systems

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  • 100 x 100 x 100 µm Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • 1 nm Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers




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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Resolution

Stiffness

P-611.3S NanoCube® XYZ Piezo Nanopositioning Systems XYZ 1.00 nm 15 N 100 µm 2.00 nm 0.3 N/µm ±20%
P-611.3O NanoCube® XYZ Piezo Nanopositioning Systems XYZ 1.00 nm 15 N 100 µm N/A 0.3 N/µm ±20%
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