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 All Categories    PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture > PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology > View Items
 

PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology

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  • XY-Travel to 1000 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions




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  Results 1 - 6 of 6 1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Closed Loop Linearity

Stiffness

Closed Loop Resolution

Push Force Capacity (in X and Y)

P-620.2CD PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology XY 0.10 nm 10 N 0.02 % 0.40 N/µm 0.20 nm 10 N
P-621.2CD PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology XY 0.20 nm 10 N 0.02 % 0.25 N/µm 0.40 nm 10 N
P-622.2CD PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology XY 0.40 nm 10 N 0.02 % 0.20 N/µm 0.70 nm 10 N
P-625.2CD PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology XY 0.50 nm 10 N 0.03 % 0.10 N/µm 1.40 nm 10 N
P-628.2CD PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology XY 0.50 nm 10 N 0.03 % 0.05 N/µm 3.50 nm 10 N
P-62x.20L PIHera® Long-Range XY Piezo Nanopositioning Stages with Direct Metrology XY N/A N/A N/A N/A N/A N/A
  Results 1 - 6 of 6 1 


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