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 All Categories    HexaLight™ 6-Axis-Parallel Kinematics Microrobot
All Categories > Micropositioning:
Motorized Stages, Hexapods, Controllers
> Hexapods Six-Axis Micropositioning Systems > HexaLight™ 6-Axis-Parallel Kinematics Microrobot > View Items
 

HexaLight™ 6-Axis-Parallel Kinematics Microrobot

Check up to five results to perform an action.

  • Six Degrees of Freedom
  • Rapid Response
  • No Moving Cables for Improved Reliability and Precision
  • 10 kg Load Capacity
  • Repeatability to ±2 µm
  • Actuator Resolution to 0.016 µm
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions
  • Virtualized Pivot Point
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF




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Item #

Item Name

Travel Range X, Y

Travel Range Z

Travel Range θX, θY

Travel Range θZ

Min. Incremental Motion X, Y

Max. Speed

M-840.5PD HexaLight™ 6-Axis-Parallel Kinematics Microrobot ±50 mm ±25 mm ±15 ° ±30 ° 3 µm 50 mm/s
M-840.5DG HexaLight™ 6-Axis-Parallel Kinematics Microrobot ±50 mm ±25 mm ±15 ° ±30 ° 1 µm 2.5 mm/s
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