• Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • 200 kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±1 µm
  • Actuator Resolution to 0.005 µm
  • Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Compatible Versions
  • Linear and Rotary Multi-Axis Scans
  • Virtualized Center of Rotation (Pivot Point)
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF
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Item #

Item Name

Travel Range X, Y

Travel Range Z

Min. Incremental Motion, X, Y, Z

Max. Speed

Max. Speed θX, θY, θZ

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N/A Compact 6-Axis Hexapod Microrobot, Parallel Kinematics N/A ±50 mm N/A ±25 mm N/A X, Y: 1 µm , Z: 0.5 µm N/A 0.5 mm/s N/A 6 mrad/s N/A Specifications, CAD / Drawings, Manuals, Videos
N/A Compact 6-Axis Hexapod Microrobot, Parallel Kinematics N/A ±50 mm N/A ±25 mm N/A X, Y: 1 µm , Z: 0.5 µm N/A 8.0 mm/s N/A 100 mrad/s N/A Specifications, CAD / Drawings, Manuals, Videos
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