• Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives
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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Closed Loop Resolution

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

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N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.60 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.60 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.4 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
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