• Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives
1 - 9 of 9 | Results Per Page | View | Unit of Measure
1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Closed Loop Resolution

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

Click Link for More Information

N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.60 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A Z N/A 0.60 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.2 nm N/A 50 N N/A 0.50 nm N/A 50 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .570 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.4 nm N/A 50 N N/A 0.50 nm N/A 100 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
N/A 3-Axis Z/Tip/Tilt Piezo Nanopositioning / Scanning Flexure Stages with Parallel Metrology N/A ZΘXΘY N/A 0.4 nm N/A 50 N N/A 1.00 nm N/A 200 µmUp to 4 mrad N/A 0.03 % N/A Z: 100 N N/A .350 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
1 - 9 of 9 | Results Per Page | View | Unit of Measure
1