• 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
  • <0.1 Nanometer Resolution
  • Capacitive Sensor Option for Highest Linearity and Stability
  • Invar Option for Highest Thermal Stability
  • Aperture with Open-Loop Versions
  • 3 µm Travel Range
  • Compact Size : 30 mm Diameter x 10 mm