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 All Categories    Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology > View Items
 

Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology

Check up to five results to perform an action.

  • Higher Speed Through Direct Drive
  • Up to 2.2 kHz Resonant Frequency in X and Y
  • 30 x 30 or 30 x 30 x 10 µm Travel Range
  • 100 Picometers Resolution
  • Capacitive Sensors for Highest Linearity
  • Parallel - Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Active Runout Compensation
  • 50 x 50 mm Clear Aperture
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives





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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Closed Loop Resolution

Unloaded Resonant Frequency

P-733.2DD Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology XY 0.10 nm 20 N 33 µm 0.03 % 300 N 0.10 nm 2.230 kHz
P-733.3DD Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology XYZ 0.10 nm 20 N 33 µm 0.03 % 300 N 0.10 nm 2.230 kHz
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