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 All Categories    Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology > View Items
 

Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology

Check up to five results to perform an action.

  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics and Optional Parallel Metrology for Fast Response and Superior Multi-Axis Precision
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • To 200 x 200 µm Travel Range
  • Direct Drive Version for High-Speed Positioning & Scanning
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime





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Item #

Item Name

Active Axes

Unloaded Resonant Frequency

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity

P-541.2CD Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology XY .5 kHz 0.20 nm 20 N 150 µm 0.03 % 100 N
P-542.2CD Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology XY .370 kHz 0.40 nm 20 N 250 µm 0.03 % 100 N
P-541.2DD Low-Profile, XY Piezo Scanning Microscopy Stages with Parallel Metrology XY 1.50 kHz 0.10 nm 20 N 60 µm 0.03 % 200 N
  Results 1 - 3 of 3 1 


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