PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Tech blog
Videos
News

Search Catalog
      GO   
 All Categories    NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology > View Items
 

NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology

Check up to five results to perform an action.

  • 350 x 350 x 250 µm Closed-Loop Travel Range
  • Parallel-Kinematics Design & Direct Capacitive Metrology for Higher Multi-Axis Accuracy
  • Compact Design : 80 x 80 x 42 mm (Open & Closed-Loop Versions)
  • 10 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Drives
  • 1 nm Resolution
  • Ideal for Alignment and Photonics Packaging Applications Vacuum Compatible to 10-6 hPa




    border="0" Printable Page  
    Email Email This Page  
    Save To Favorites Save To Favorites
  
Compare Items
   
  Results 1 - 3 of 3 1 

Item #

Item Name

Active Axes

Open Loop Resolution

Travel Range

Closed Loop Linearity

Unloaded Resonant Frequency

P-615.3CD NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology XYZ 0.50 nm 400 µm 0.02 % .210 kHz
P-615.3CL NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology XYZ 0.50 nm 400 µm 0.02 % .210 kHz
P-615.30L NanoCube® XYZ Piezo Nano Alignment Systems with Parallel Metrology XYZ 0.50 nm 400 µm N/A .210 kHz
  Results 1 - 3 of 3 1 


© 1996-2017 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.