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 All Categories    Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology > View Items
 

Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology

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  • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Flatness in the Low Nanometer Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness and Automatic Runout Compensation
  • 100 x 100 µm Travel Range
  • Direct-Metrology Capacitive Sensors for Higher Precision
  • 56 x 56 mm Clear Aperture
  • PICMA®High-Performance Multilayer Piezo Drives




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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

P-734.2CD Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology XY 0.20 nm 20 N 100 µm 0.03 % 300 N .5 kHz
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