• Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Flatness in the Low Nanometer Range
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness and Automatic Runout Compensation
  • 100 x 100 µm Travel Range
  • Direct-Metrology Capacitive Sensors for Higher Precision
  • 56 x 56 mm Clear Aperture
  • PICMA®High-Performance Multilayer Piezo Drives


P-734 nanopositioning X-Y tables are designed for surface metrology applications with extremely low out-of-plane motion. These monolithic 2-axis nanopositioners use piezoelectric actuator drives to move a flexure guided system with a large aperture. Computer Control / Software: These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration. If long travel motion in the 100’s of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.

Computer Control / Software:

These multi-axis nanopositioning stages be computer controlled via a digital nanopositioning motion controller of the E-727 multi-axis controller series. LabView drivers and MatLab examples are available for easy integration. If long travel motion in the 100’s of mm is required, check our V-817 linear motor slides and our 2-axis long travel XY-tables. Motorized precision linear slides from PI are available with air bearings and mechanical precision bearings.

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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

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N/A Ultra-Precision Trajectory, Nanopositioning XY-Tables with Parallel Metrology N/A XY N/A 0.2 nm N/A 20 N N/A 100 x 100 µm N/A 0.03 % N/A 50 N N/A .5 kHz N/A Specifications, CAD / Drawings, Manuals, Videos
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