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Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
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Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
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Up to 15 mm Travel
1 nm Resolution
Closed-Loop Piezo Drives Available
Stepper- & DC-Motor Drives
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Results 1 - 8 of 8
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Item #
Item Name
Key Features
Active Axes
Motorized Travel Range (XYZ)
Design Resolution (Motor)
Motorized Stage
Material
F-130.3SD
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Closed-loop DC motors, Closed-loop PZT Drives
XYZ
5
mm
0.007
µm
M-110.3DG
Al
S
F-130.3SS
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Stepper motors, Closed-loop PZT Drives
XYZ
5
mm
0.006
µm
M-110.32S
Al
S
F-130.3OD
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Closed-loop DC motors, Open-loop PZT Drives
XYZ
5
mm
0.007
µm
M-110.3DG
Al
S
F-130.3OS
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Stepper Motors, Open-loop PZT Drives
XYZ
5
mm
0.006
µm
M-110.32S
Al
S
F-131.3SD
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Closed-loop DC motors, Closed-loop PZT Drives
XYZ
15
mm
0.007
µm
M-111.3DG
Al
S
F-131.3SS
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Stepper motors, Closed-loop PZT Drives
XYZ
15
mm
0.006
µm
M-111.32S
Al
S
F-131.3OD
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Closed-loop DC motors, Open-loop PZT Drives
XYZ
15
mm
0.007
µm
M-111.3DG
Al
S
F-131.3OS
Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
Stepper Motors, Open-loop PZT Drives
XYZ
15
mm
0.006
µm
M-111.32S
Al
S
Results 1 - 8 of 8
1
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