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High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
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High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
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10 mm Clear Aperture
Piezo Tripod Design Allows Z Motion and Tilt
Up to 2.4 mrad Optical Beam Deflection
Piston Movement up to 12 µm
Closed-Loop Versions for Better Linearity
For Optics, Mirrors or Other Components
Zero Friction Guiding Mechanism
Single-Moving-Platform, Parallel-Kinematics Design : Equal Dynamics for all Axes, Better Linearity & Temperature Stability
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Item #
Item Name
Active Axes
Closed Loop Resolution
Closed Loop Tilt Angle
Unloaded Resonant Frequency
Open Loop Linear Travel at 0 to 100 V
Integrated Feedback Sensor
Open Loop Linear Resolution
Stiffness (Z)
S-310.10
High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
Z
N/A
N/A
9.50
kHz
6 µm ±20%
N/A
N/A
20 N/µm ±20%
S-314.10
High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
Z
N/A
N/A
5.50
kHz
12 µm ±20%
N/A
N/A
10 N/µm ±20%
S-311.10
High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
Z
θX
θY
N/A
N/A
9.50
kHz
6 µm ±20%
N/A
0.01
µrad
20 N/µm ±20%
S-315.10
High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
Z
θX
θY
N/A
N/A
5.50
kHz
12 µm ±20%
N/A
0.02
µrad
10 N/µm ±20%
S-316.10
High-Speed Multi-Axis Tip/Tilt Platforms and Z Positioners
Z
θX
θY
0.40
nm
1.2
mrad
5.50
kHz
12 µm ±20%
3 x Strain gauge
0.02
µrad
10 N/µm ±20%
Results 1 - 5 of 5
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