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 All Categories    LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology > View Items
 

LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology

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  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 nm Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA®High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available




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Item #

Item Name

Active Axes

Open Loop Resolution

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

P-753.1CD LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology X 0.05 nm 12 µm 0.03 % 100 N 5.60 kHz
P-753.2CD LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology X 0.10 nm 25 µm 0.03 % 100 N 3.70 kHz
P-753.3CD LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology X 0.20 nm 38 µm 0.03 % 100 N 2.90 kHz
  Results 1 - 3 of 3 1 


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