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 All Categories    Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology > View Items
 

Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology

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  • Fast Response (1 kHz Resonant Frequency)
  • Stainless Steel Construction
  • Frictionless Precision Flexure Guiding System
  • 80 µm Travel Range
  • Direct Metrology with LVDT Sensor
  • Resolution <5 nm
  • PICMA® High-Performance Multilayer Piezo Drives





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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

P-780.00 Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology X 1.00 nm 10 N 80 µm N/A 50 N 1 kHz
P-780.20 Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology X 1.00 nm 10 N 80 µm 0.10 % 50 N 1 kHz
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