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 All Categories    Ultra-Compact Piezo NanoAutomation® Stage with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > Ultra-Compact Piezo NanoAutomation® Stage with Direct Metrology > View Items
 

Ultra-Compact Piezo NanoAutomation® Stage with Direct Metrology

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  • Smallest Flexure-Guided Stage with Capacitive Feedback
  • Ideal for Head/Media Test & Fiber Optics
  • Resolution <0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives





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Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Push Force Capacity (in Operating Direction)

Unloaded Resonant Frequency

P-772.1CD Ultra-Compact Piezo NanoAutomation® Stage with Direct Metrology X 0.05 nm 5 N 12 µm 0.03 % 50 N 1.70 kHz
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