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 All Categories    PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology > View Items
 

PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology

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  • Travel to 950 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions




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  Results 1 - 6 of 6 1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Unloaded Resonant Frequency

Push Force Capacity (X)

P-620.1CD PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology X 0.10 nm 10 N 60 µm 0.02 % 1.24 kHz 10 N
P-621.1CD PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology X 0.20 nm 10 N 120 µm 0.02 % 0.800 kHz 10 N
P-622.1CD PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology X 0.40 nm 10 N 300 µm 0.02 % 0.400 kHz 10 N
P-625.1CD PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology X 0.50 nm 10 N 600 µm 0.03 % .215 kHz 10 N
P-628.1CD PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology X 0.50 nm 10 N 950 µm 0.03 % .125 kHz 10 N
P-62x.10L PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology X N/A N/A N/A N/A N/A N/A
  Results 1 - 6 of 6 1 


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