Sub-Nanometer-Resolution Measuring Position Sensors, Capacitive
Capacitive Nanopositioning and Nanomeasuring Sensors
- Measuring Range to 1000 µm
- Resolution <0.01 nm
- Linearity to 0.003 %
- Bandwidth to 10 kHz
- Integrated Linearization System (ILS)
- Custom Designs
Unit of Measure
Item # |
Item Name |
Power Supply |
Analog Output |
Noise Factor |
Temperature Drift (typ.) |
Nominal Measuring Distance |
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---|---|---|---|---|---|---|---|
E-509.CxA | N/A Capacitive Sensor Electronics | Power Supply N/A ±15 V | Analog Output N/A ±5 V (0V - 10V) | Noise Factor N/A 0.115 ppm/√Hz | Temperature Drift (typ.) N/A -30 ppm/K | Nominal Measuring Distance N/A |
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N/A Specifications, CAD / Drawings, Manuals, Videos |
D-015.00 | N/A Capacitive Sensors | Power Supply N/A | Analog Output N/A | Noise Factor N/A | Temperature Drift (typ.) N/A | Nominal Measuring Distance N/A 15 µm |
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N/A Specifications, CAD / Drawings, Manuals, Videos |
D-050.00 | N/A Capacitive Sensors | Power Supply N/A | Analog Output N/A | Noise Factor N/A | Temperature Drift (typ.) N/A | Nominal Measuring Distance N/A 50 µm |
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N/A Specifications, CAD / Drawings, Manuals, Videos |
D-100.00 | N/A Capacitive Sensors | Power Supply N/A | Analog Output N/A | Noise Factor N/A | Temperature Drift (typ.) N/A | Nominal Measuring Distance N/A 100 µm |
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N/A Specifications, CAD / Drawings, Manuals, Videos |