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> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture > Compact Z and XZ Piezoelectric Nanopositioning Systems > View Items
 

Compact Z and XZ Piezoelectric Nanopositioning Systems

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  • Small Footprint: 44 x 44 mm
  • 100 µm Travel
  • Range Resolution to 0.2 nm
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models



  Results 1 - 4 of 4 1 

Item #

Item Name

Active Axes

Open Loop Resolution

Max. Normal Load

Travel Range

Closed Loop Linearity

Closed Loop Resolution

Stiffness

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Unloaded Resonant Frequency

P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems XZ 0.20 nm 15 N N/A 0.10 % 2.00 nm 0.21/0.35 N/µm ±20° N/A
P-611.XZ0 Compact Z and XZ Piezoelectric Nanopositioning Systems XZ 0.20 nm 15 N N/A N/A N/A 0.21/0.35 N/µm ±20° N/A
P-611.ZS Compact Z and XZ Piezoelectric Nanopositioning Systems Z 0.20 nm 15 N 120 µm 0.10 % 2.00 nm 0.45 N/µm ±20° 0.460 kHz
P-611.Z0 Compact Z and XZ Piezoelectric Nanopositioning Systems Z 0.20 nm 15 N 120 µm N/A N/A 0.45 N/µm ±20° 0.460 kHz
  Results 1 - 4 of 4 1 
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