PI (Physik Instrumente) L.P.
16 Albert St., Auburn, MA 01501
Telephone: (508) 832-3456 • Fax: (508) 832-0506
E-Mail: info@pi-usa.us • Website: www.pi-usa.us
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology > Item # P-558.TCD
 


Item # P-558.TCD, Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology


  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives



 Specifications 

Active Axes

ZΘXΘY

Open Loop Resolution

0.20 nm

Max. Normal Load

50 N

Closed Loop Resolution

0.50 nm

Travel Range

50 µm

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

Z: 100 N

Unloaded Resonant Frequency

.570 kHz

Closed Loop Travel Range

50 µm

Integrated Feedback Sensor

3 x Capacitive

Full-Range Repeatability (typ.)

±5 nm (±0.1 µrad)

Stiffness

Z: 4.0 µm ±20%

Pull Force Capacity (in Operating Direction)

Z: 50 N

Electrical Capacitance

View
Z: 6.5 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
Z: 16.5 µA/(Hz x mrad)

Resonant Frequency at 500 g Load

Z: 410 θX, θY: 430 Hz ±20%

Resonant Frequency at 2500 g Load

Z: 240 θX, θY: 245 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

D

Sensor Connection

D

Weight (with Cables)

1380 g ±5%

Body Material

Al

Recommended Amplifier / Controller

K

Application

Biotechnology
Disk drive testing

Laser technology

Lithography

Metrology

Micromanufacturing

Nanopositioning

Scanning microscopy



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