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 All Categories    Compact Z and XZ Piezoelectric Nanopositioning Systems
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages without Aperture > Compact Z and XZ Piezoelectric Nanopositioning Systems > Item # P-611.XZ0
 

Item # P-611.XZ0, Compact Z and XZ Piezoelectric Nanopositioning Systems


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  • Small Footprint: 44 x 44 mm
  • 100 µm Travel
  • Range Resolution to 0.2 nm
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models




 Specifications   

Active Axes

XZ

Open Loop Resolution

0.20 nm

Max. Normal Load

15 N

Weight (with Cables)

270 g ±5%

Body Material

Al
S

Min. Open-Loop Travel at -20 to 120 V per axis

120 µm

Stiffness

0.21/0.35 N/µm ±20°

Electrical Capacitance

1.5 µF ±20% / axis

Dynamic Operating Current Coefficient (DOCC)

View
1.7 µA/(Hz x µm) / axis

Unloaded Resonant Frequency (X/Z)

365 / 340 Hz ±20%

Resonant Frequency at 30 g Load

280 / 295 Hz ±20%

Resonant Frequency at 100 g Load

185 / 230 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

VL

Recommended Amplifier / Controller

A, G

Application

Micromachining
Micromanipulation (life science)

Photonics packaging & fiber optics

Semiconductor test systems


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