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 All Categories    Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology > Item # P-528.ZCD
 

Item # P-528.ZCD, Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology


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  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives




 Specifications   

Active Axes

Z

Open Loop Resolution

0.60 nm

Max. Normal Load

50 N

Closed Loop Resolution

1.00 nm

Travel Range

200 µm

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

Z: 100 N

Unloaded Resonant Frequency

0.350 kHz

Closed Loop Travel Range

200 µm

Integrated Feedback Sensor

1 x Capacitive

Full-Range Repeatability (typ.)

±10 nm

Stiffness

Z: 1.5 µm ±20%

Pull Force Capacity (in Operating Direction)

Z: 50 N

Electrical Capacitance

View
12.5 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
8 µA/(Hz x mrad)

Resonant Frequency at 500 g Load

210 Hz ±20%

Resonant Frequency at 2500 g Load

115 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

VL (Version .ZCD with one Sub-D special connector only (sensor and operating voltage).)

Sensor Connection

2 x C (Version .ZCD with one Sub-D special connector only (sensor and operating voltage).)

Weight (with Cables)

1420 g ±5%

Body Material

Al

Recommended Amplifier / Controller

H, F, L / M

Application

Biotechnology
Disk drive testing

Laser technology

Lithography

Metrology

Micromanufacturing

Nanopositioning

Scanning microscopy


 MORE IMAGES 

·  Dimensional Drawing


 DOWNLOADS 

Description/Datasheet




© 1996-2018 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.