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 All Categories    Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology > Item # P-518.TCD
 

Item # P-518.TCD, Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages with Parallel Metrology


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  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 200 µm / 4 mrad
  • Clear Aperture 66 x 66 mm
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • PICMA® High-Performance Multilayer Piezo Drives




 Specifications   

Active Axes

ZΘXΘY

Open Loop Resolution

0.40 nm

Max. Normal Load

50 N

Closed Loop Resolution

0.50 nm

Travel Range

100 µm

Closed Loop Linearity

0.03 %

Push Force Capacity (in Operating Direction)

Z: 100 N

Unloaded Resonant Frequency

.5 kHz

Closed Loop Travel Range

100 µm

Integrated Feedback Sensor

3 x Capacitive

Full-Range Repeatability (typ.)

±5 nm (±0.1 µrad)

Stiffness

Z: 2.7 µm ±20%

Pull Force Capacity (in Operating Direction)

Z: 50 N

Electrical Capacitance

View
Z: 9 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
Z: 11.5 µA/(Hz x mrad)

Resonant Frequency at 500 g Load

Z: 350 θX, θY: 370 Hz ±20%

Resonant Frequency at 2500 g Load

Z: 190 θX, θY: 200 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

D

Sensor Connection

D

Weight (with Cables)

1400 g ±5%

Body Material

Al

Recommended Amplifier / Controller

K

Application

Biotechnology
Disk drive testing

Laser technology

Lithography

Metrology

Micromanufacturing

Nanopositioning

Scanning microscopy


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·  Dimensional Drawing


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Description/Datasheet




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