PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Tech blog
Videos
News

Search Catalog
      GO   
 All Categories    Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology > Item # P-541.ZCD
 

Item # P-541.ZCD, Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages for Microscopy with Parallel Metrology


    border="0" Printable Page  
    Email Email This Page  
    Save To Favorites Save To Favorites
  

  • Lower Profile for Easy Integration: 16.5 mm
  • Z and Tip/Tilt Versions
  • Choice of Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • 100 µm Linear Travel Range, 1 mrad Tilt
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime
  • Ideal for fast Z-Stack Acquisition and 3D Deconvolution Imaging




 Specifications   

Active Axes

Z

Unloaded Resonant Frequency

.410 kHz

Open Loop Resolution

0.20 nm

Max. Normal Load

20 N

Closed Loop Resolution

0.80 nm

Travel Range

150 µm

Closed Loop Linearity

0.03 %

Closed Loop Travel Range

100 µm

Integrated Feedback Sensor

Capacitive

Push Force Capacity

100 N

Pull Force Capacity

20 N

Electrical Capacitance

6.75 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
8.5 µA/(Hz x µm)

Resonant Frequency at 185 g Load

300 Hz ±20%

Operating Temperature

-20 to 80 °C

Voltage and Sensor Connection

View
D

Body Material

Al

Recommended Amplifier / Controller

H, F, L

Application

Biotechnology
Mask & wafer alignment

Micromanipulation

Scanning interferometry

Scanning microscopy

Surface metrology


 MORE IMAGES 

·  Chart

·  Dimensional Drawing


 DOWNLOADS 

Description/Datasheet




© 1996-2018 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.