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All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Item # P-732.ZC

Item # P-732.ZC, High-Dynamics Vertical Nanopositioning/Scanning Stage

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  • High Stiffness for High-Dynamics Operation
  • Up to 15µm Vertical Travel Range
  • <1 nm Resolution
  • Straightness of travel <10 µrad
  • Clear Aperture with 25 mm Diameter


Active Axes


Unloaded Resonant Frequency

1.50 kHz

Open Loop Resolution

0.10 nm

Max. Normal Load

20 N

Travel Range

15 µm

Closed Loop Linearity

0.03 %

Closed Loop Travel Range

12 µm

Integrated Feedback Sensor


Closed Loop Resolution

0.10 nm

Tilt (θX, θY) (typ.)

<10 µrad

Electrical Capacitance

5.4 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

56 µA/(Hz x µm)

Resonant Frequency at 500 g Load

680 Hz ±20%

Operating Temperature

-20 to 80 °C

Voltage Connection


Sensor Connection

2 x C

Body Material


Recommended Driver / Controller

H, F, L


Confocal microscopy

Scanning interferometry

Scanning microscopy

Semiconductor test equipment

Surface structure analysis


·  Dimensional Drawing


Description / Datasheet / Order Info

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