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 All Categories    High-Dynamics Vertical Nanopositioning/Scanning Stage
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Item # P-732.ZC
 

Item # P-732.ZC, High-Dynamics Vertical Nanopositioning/Scanning Stage


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  • High Stiffness for High-Dynamics Operation
  • Up to 15µm Vertical Travel Range
  • <1 nm Resolution
  • Straightness of travel <10 µrad
  • Clear Aperture with 25 mm Diameter





 Specifications   

Active Axes

Z

Unloaded Resonant Frequency

1.50 kHz

Open Loop Resolution

0.10 nm

Max. Normal Load

20 N

Travel Range

15 µm

Closed Loop Linearity

0.03 %

Closed Loop Travel Range

12 µm

Integrated Feedback Sensor

Capacitive

Closed Loop Resolution

0.10 nm

Tilt (θX, θY) (typ.)

<10 µrad

Electrical Capacitance

5.4 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
56 µA/(Hz x µm)

Resonant Frequency at 500 g Load

680 Hz ±20%

Operating Temperature

-20 to 80 °C

Voltage Connection

VL

Sensor Connection

2 x C

Body Material

Al

Recommended Driver / Controller

H, F, L

Application

Biotechnology
Confocal microscopy

Scanning interferometry

Scanning microscopy

Semiconductor test equipment

Surface structure analysis


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·  Dimensional Drawing


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Description / Datasheet / Order Info




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