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 All Categories    Compact Piezo Elevation Stage with Aperture
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-/Tip/Tilt Stages (with Aperture) > Compact Piezo Elevation Stage with Aperture > Item # P-612.ZSL
 

Item # P-612.ZSL, Compact Piezo Elevation Stage with Aperture


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  • Small Footprint: 60 x 60 mm
  • For Cost-Sensitive Applications
  • 100 µm Travel
  • Range Resolution to 0.2 nm
  • Clear Aperture : 20 x 20 mm
  • PICMA® High-Performance Multilayer Piezo Actuators




 Specifications   

Active Axes

Z

Open Loop Resolution

0.20 nm

Max. Normal Load

15 N

Travel Range

110 µm

Closed Loop Linearity

0.20 %

Unloaded Resonant Frequency

.490 kHz

Weight (with Cables)

280 g ±5%

Closed Loop Travel Range

100 µm

Integrated Feedback Sensor

SGS

Closed Loop Resolution

2.00 nm

Repeatability

10 nm

Stiffness

0.6 N/µm ±20°

Tilt (θX, θY) (typ.)

<20 µrad

Electrical Capacitance

3 µF ±20%

Resonant Frequency at 30 g Load

420 Hz ±20%

Operating Temperature Range

-40 to +120 °C

Voltage Connection

VL

Sensor Connection

L

Body Material

Al

Recommended Amplifier / Controller

D, H

Application

Biotechnology
Interferometry

Microscopy

Nanopositioning

Quality assurance

Semiconductor technology


 MORE IMAGES 

·  Curve

·  Dimensional Drawing


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Description/Datasheet




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