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All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Steering Mirrors / Active Optics > Single-Axis Platforms / Shifters > High-Speed Miniature Piezo Tilt Mirror > Item # S-226.00

Item # S-226.00, High-Speed Miniature Piezo Tilt Mirror

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  • Sub-µrad Resolution
  • Very Fast: 10 kHz Resonant Frequency for Sub-Millisecond Response
  • Up to 4.4 mrad Optical Beam Deflection
  • Closed-Loop Versions for Better Linearity
  • Includes BK7 Mirror
  • Zero Friction Flexure Guiding System


Active Axes


Open Loop Angular Resolution

0.05 µrad

Unloaded Resonant Frequency

9.00 kHz

Closed Loop Resolution

0.10 nm

Closed Loop Angular Resolution

0.10 µrad

Open Loop Tilt Angle

2.2 mrad ±20%

Integrated Feedback Sensor

Strain Gauge

Weight (without Cables)

98 g±5%

Electrical Capacitance

1.5 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

0.1 µ A/(Hz x µrad)

Resonant Frequency with Ø15 x 4 mm Glass Mirror (included)

7.5 kHz ±20%

Resonant Frequency with Ø15 x 4 mm Copper Mirror

5.7 kHz ±20%

Distance, Pivot Point to Platform Surface (T)

4 mm

Platform Moment of Inertia

215 g.mm2

Operating Temperature Range

-20 to +80 °C

Voltage Connection


Material (Case)


Material (Platform)


Recommended Amplifier / Controller

H, D

Closed Loop Tilt Angle

2.0 mrad

Closed Loop Linearity

0.20 %

Full-Range Repeatability (typ.)

±3 µrad

Sensor Connection



Beam switching
Correction of polygon scanner errors

Laser beam stabilization

Laser beam steering and scanning


·  Dimensional Drawing


Piezo Steering Mirror Fundamentals


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