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 All Categories    Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy > Item # P-541.20L
 

Item # P-541.20L, Low-Profile, Parallel-Kinematics XY Piezo Scanning Stages for Microscopy


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  • Low Profile for Easy Integration: 16.5 mm
  • Parallel Kinematics for Fast Response
  • To 200 x 200 µm Travel Range
  • 80 x 80 mm Clear Aperture
  • PICMA® High-Performance Multilayer Piezo Actuators for Superior Lifetime




 Specifications   

Active Axes

XY

Unloaded Resonant Frequency

.5 kHz

Open Loop Resolution

0.20 nm

Max. Normal Load

20 N

Travel Range

150 µm

Closed Loop Travel Range

100 µm

Push Force Capacity

100 N

Pull Force Capacity

30 N

Electrical Capacitance (per Axis)

6.75 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
8.5 µA/(Hz x µm)

Operating Temperature

-20 to 80 °C

Voltage and Sensor Connection

View
VL

Body Material

Al

Recommended Amplifier / Controller

A, G

Application

Biotechnology
Mask & wafer alignment

Micromanipulation

Optical trapping

Scanning microscopy

Surface metrology


 MORE IMAGES 

·  Curve

·  PIFOC Nanofocusing


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Description/Datasheet




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