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 All Categories    Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Item # P-770.00
 

Item # P-770.00, Large-Aperture, XY Piezo Nanopositioning / Scanning Stage with Parallel Metrology


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  • Precision Trajectory Control
  • Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • For XY Scanning and Positioning
  • 200 x 200 mm Clear Aperture
  • 200 x 200 µm Range
  • Closed-Loop Resolution <10 nm
  • PICMA® High-Performance Multilayer Piezo Drives





 Specifications   

Active Axes

XY

Open Loop Resolution

2.00 nm

Max. Normal Load

20 N

Travel Range

200 µm

Push Force Capacity (in Operating Direction)

50 N

Unloaded Resonant Frequency

.090 kHz

Closed Loop Linearity

0.10 %

Closed Loop Travel Range

200 µm

Integrated Feedback Sensor

LVDT

Closed Loop Resolution

10.00 nm

Full-Range Repeatability (typ.)

±20 nm

Stiffness

0.2 N/µm ±20%

Pull Force Capacity (in Operating Direction)

10 N

Electrical Capacitance (per Axis)

12 µF ±20%

Dynamic Operating Current Coefficient (per Axis)

View
10 µA/(Hz x µm)

Operating Temperature Range

-20 to +80 °C

Voltage Connection

D

Sensor Connection

View
D

Weight

2000 g ±5%

Body Material

Al

Recommended Amplifier / Controller

H, F

Application

Metrology
Nanopositioning

Precision mask and wafer alignment

Scanning interferometry

Semiconductor test equipment

Surface structure analysis


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·  Small and Large Aperture Systems

·  Dimensional Drawing


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Description / Datasheet / Order Info




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