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 All Categories    Compact XY Piezo-Nanopositioner with Aperture
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Multi-Axis Stages with Aperture > Compact XY Piezo-Nanopositioner with Aperture > Item # P-612.2SL
 

Item # P-612.2SL, Compact XY Piezo-Nanopositioner with Aperture


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  • Small Footprint : 60 x 60 mm
  • 100 x 100 µm Travel Range
  • Resolution to 0.8 nm
  • For Cost-Sensitive Applications
  • Clear Aperture: 20 x 20 mm
  • PICMA ® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available





 Specifications   

Active Axes

XY

Open Loop Resolution

0.80 nm

Closed Loop Linearity

0.50 %

Max. Load

1.5 kg

Weight (with Cables)

200 g ±5%

Body Material

S, Al

Travel Range

120 µm

Closed Loop Travel Range

100 µm

Integrated Feedback Sensor

SGS

Closed Loop Resolution

2.00 nm

Repeatability

< 25 nm

Stiffness

0.3 N/µm ±20%

Electrical Capacitance

1.5 µF ±20% / axis

Dynamic Operating Current Coefficient (DOCC)

View
1.7 / axis

Unloaded Resonant Frequency

.5 kHz

Resonant Frequency at 100 g Load

170 / 200 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

VL

Sensor Connection

L

Recommended Amplifier / Controller

D, H


 MORE IMAGES 

·  Dimensional Drawing

·  XY-scanners


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Description/Datasheet




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