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 All Categories    PICA™-Shear Piezo Actuators - Compact Multiaxis Motion
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezoelectric Actuators, Translators, Piezo Ceramic Components > Piezo Shear Actuators, Multi-Axis Actuators > PICA™-Shear Piezo Actuators - Compact Multiaxis Motion > Item # P-151.03
 

Item # P-151.03, PICA™-Shear Piezo Actuators - Compact Multiaxis Motion


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  • Compact Multiaxis Actuators
  • X, XY, XZ and XYZ Versions
  • High Resonant Frequencies
  • Extreme Reliability >109 Cycles
  • Picometer-Resolution / Sub-Millisecond Settling Time
  • Optional Ultra-High-Vacuum-Compatible Versions to 10-9 hPa
  • Non-Magnetic and Clear Aperture Versions




 Specifications   

Active Axes

X

Travel Range

3 µm

Cross Section A x B / ID

16 x 16 mm

Length L

5.5 mm ±0.3

Max. Shear Load

300 N

Unloaded Resonant Frequency

210 kHz

Static Large-Signal Stiffness

View
1300 N/µm

Capacitance

43 nF ±20%

Application

Active vibration cancellation
Atomic force microscopy

Laser tuning

Linear motors

Nanopositioning

Precision mechanics

Scanning applications

Semiconductor manufacturing and testing

Switching


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·  Piezo Scanner Tube Working Principle


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Description/Datasheet




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