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 All Categories    PICA™-Shear Piezo Actuators - Compact Multiaxis Motion
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> Piezoelectric Actuators, Translators, Piezo Ceramic Components > Piezo Shear Actuators, Multi-Axis Actuators > PICA™-Shear Piezo Actuators - Compact Multiaxis Motion > Item # P-112.01
 

Item # P-112.01, PICA™-Shear Piezo Actuators - Compact Multiaxis Motion


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  • Compact Multiaxis Actuators
  • X, XY, XZ and XYZ Versions
  • High Resonant Frequencies
  • Extreme Reliability >109 Cycles
  • Picometer-Resolution / Sub-Millisecond Settling Time
  • Optional Ultra-High-Vacuum-Compatible Versions to 10-9 hPa
  • Non-Magnetic and Clear Aperture Versions




 Specifications   

Active Axes

XY

Travel Range

1 µm

Cross Section A x B / ID

3 x 3 mm

Length L

5 mm ±0.3

Max. Shear Load

20 N

Unloaded Resonant Frequency

230 kHz

Static Large-Signal Stiffness

View
50 N/µm

Capacitance

0.5 / 0.5 nF ±20%

Application

Active vibration cancellation
Atomic force microscopy

Laser tuning

Linear motors

Nanopositioning

Precision mechanics

Scanning applications

Semiconductor manufacturing and testing

Switching


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