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All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Capacitive Sensors > Sub-Nanometer-Resolution Capacitive Position Sensors > Item # E-509.CxA
 

Item # E-509.CxA, Capacitive Sensor Electronics


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  • Measuring Range to 1000 µm
  • Resolution <0.01 nm
  • Linearity to 0.003 %
  • Bandwidth to 10 kHz
  • Integrated Linearization System (ILS)
  • Custom Designs





 Specifications   

Power Supply

±15 V

Analog Output

±5 V (0V - 10V)

Noise Factor

View
0.115 ppm/√Hz

Bandwidth

0.3 to 3 kHz, Selectable; upto 10 kHz on request

Temperature Drift (typ.)

View
-30 ppm/K

Linearity Error (before Digital Polynomial Linearization)

<0.05 %

Operating Temperature Range

-20 to +80 °C


 MORE IMAGES 

·  Probe and target Distance at center position

·  Measurement of Stability

·  Resolution Curve


 DOWNLOADS 

Description/Datasheet




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