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 All Categories    Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems
All Categories > Micropositioning:
Motorized Stages, Hexapods, Controllers
> Photonics Alignment Solutions > Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems > Item # F-130.3SS
 

Item # F-130.3SS, Compact XYZ Hybrid Motorized/Piezoelectric Photonics Alignment Systems


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  • Up to 15 mm Travel
  • 1 nm Resolution
  • Closed-Loop Piezo Drives Available
  • Stepper- & DC-Motor Drives




 Specifications   

Key Features

Stepper motors, Closed-loop PZT Drives

Active Axes

XYZ

Motorized Travel Range (XYZ)

5 mm

Piezo Travel Range (XYZ)

100 µm

Design Resolution (Motor)

0.006 µm

Min. Incremental Motion (Motor)

0.05 µm

Closed Loop Resolution (PZT)

2 nm

Open Loop Resolution (PZT)

1 nm

Motorized Stage

M-110.32S

Material

Al
S


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·  Dimensional Drawing


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Description / Datasheet / Order Info




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