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 All Categories    Z/Tilt Piezoelectric Flexure Stage
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-Actuators > Item # P-287.70
 

Item # P-287.70, Z/Tilt Piezoelectric Flexure Stage


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  • Frictionless Precision Flexure Guiding System
  • Vertical Travel to 700 µm
  • Tilt to 0.7 degrees
  • Non-Magnetic Stainless Steel Design





 Specifications   

Active Axes

X

Travel Range

700 µm

Push Force Capacity (in Operating Direction)

80 N

Unloaded Resonant Frequency

0.38 kHz

Weight (with Cables)

195 g ±5%

Body Material

N-S

Operating Temperature Range

-40 to +80 °C

Open Loop Resolution (nm at Tip)

View
0.2 (7) µrad

Stiffness (in Operating Direction)

0.13 (at tip) N/µm ±20%

Pull Force Capacity (in Operating Direction)

10 N

Electrical Capacitance

290 nF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
30 µA/(Hz x mrad)
0.5 µA/(Hz x µm at tip)

Voltage Connection

VH

Recommended Amplifier / Controller

B, I

Application

Biology
Medical analysis

Nanopositioning

Optics

Wafer inspection


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·  Dimensional Drawing


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Description / Datasheet / Order Info




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