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 All Categories    Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-Actuators > Item # P-783.ZL
 

Item # P-783.ZL, Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology


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  • Z-Travel to 300 µm
  • Low Profile
  • Frictionless Precision Flexure Guiding System
  • Internal Motion Amplifier
  • Closed-Loop Resolution <10 nm
  • PICMA®High-Performance Multilayer Piezo Drives




 Specifications   

Active Axes

Z

Open Loop Resolution

1.00 nm

Max. Normal Load

20 N

Travel Range

300 µm

Closed Loop Linearity

0.10 %

Push Force Capacity (in Operating Direction)

20 N

Unloaded Resonant Frequency

0.300 kHz

Closed Loop Travel Range

300 µm

Integrated Feedback Sensor

LVDT

Closed Loop Resolution

10.00 nm

Full-Range Repeatability (typ.)

±15 nm

Stiffness

0.15 N/µm ±20%

Pull Force Capacity (in Operating Direction)

10 N

Lateral Force Limit

0.5 N

Lateral Runout Tip (typ.)

10 µrad

Lateral Runout Tilt (typ.)

25 µrad

Electrical Capacitance

5.4 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
2 µA/(Hz x µm)

Resonant Frequency at 24 g Load

240 Hz ±20%

Resonant Frequency at 100 g Load

160 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

VL

Sensor Connection

L

Weight (with Cables)

160 g ±5%

Body Material

Al, (platform: steel)

Recommended Amplifier / Controller

H, E

Application

Biotechnology
Metrology

Micromanipulation

Nanopositioning

PCB inspection

Switching

Wafer inspection


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·  Dimensional Drawing


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Description / Datasheet / Order Info




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