PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Search Catalog
 All Categories    Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Z-Actuators > Item # P-783.ZL

Item # P-783.ZL, Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology

    border="0" Printable Page  
    Email Email This Page  
    Save To Favorites Save To Favorites

  • Z-Travel to 300 µm
  • Low Profile
  • Frictionless Precision Flexure Guiding System
  • Internal Motion Amplifier
  • Closed-Loop Resolution <10 nm
  • PICMA®High-Performance Multilayer Piezo Drives


Active Axes


Open Loop Resolution

1.00 nm

Max. Normal Load

20 N

Travel Range

300 µm

Closed Loop Linearity

0.10 %

Push Force Capacity (in Operating Direction)

20 N

Unloaded Resonant Frequency

0.300 kHz

Closed Loop Travel Range

300 µm

Integrated Feedback Sensor


Closed Loop Resolution

10.00 nm

Full-Range Repeatability (typ.)

±15 nm


0.15 N/µm ±20%

Pull Force Capacity (in Operating Direction)

10 N

Lateral Force Limit

0.5 N

Lateral Runout Tip (typ.)

10 µrad

Lateral Runout Tilt (typ.)

25 µrad

Electrical Capacitance

5.4 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

2 µA/(Hz x µm)

Resonant Frequency at 24 g Load

240 Hz ±20%

Resonant Frequency at 100 g Load

160 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection


Sensor Connection


Weight (with Cables)

160 g ±5%

Body Material

Al, (platform: steel)

Recommended Amplifier / Controller

H, E





PCB inspection


Wafer inspection

 CADs & Drawings Manuals, Videos, Specs 

Get Information

© 1996-2019 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.