PI - Motion Control & Nanopositioning Solutions

Piezo Actuators
Nanopositioning & Scanning Systems
Active Optics /
Steering Mirrors
Capacitive Position Sensors
Piezo Drivers & Nanopositioning Controllers
Hexapods /
Motorized Positioners
Photonics Alignment Solutions
Motion Controllers
Ceramic Linear Motors & Stages

Tech blog

Search Catalog
 All Categories    NEXLINE® Miniature High-Load Piezo Nanopositioning Drive
All Categories > Micropositioning:
Motorized Stages, Hexapods, Controllers
> Ceramic Linear Motors: PILine Ultrasonic Motors, Nexline PiezoWalk Nano-Drivers > Item # N-110

Item # N-110, NEXLINE® Miniature High-Load Piezo Nanopositioning Drive

    border="0" Printable Page  
    Email Email This Page  
    Save To Favorites Save To Favorites

  • Winner of the SEMI Technology Innovation Showcase Award
  • 3 mm Travel Range
  • <0.1 nm Resolution (Open-Loop)
  • Active Force Generation to 30 N
  • >50 N Holding Force Self-Locking


Travel Range in Step Mode

3 mm

Max. Step Size in Step Mode

1.5 µm

Max. Step Frequency

100 Hz

Max. Speed

0.15 mm/s

Travel Range in Analog Mode

0.8 µm

Resolution (Open-Loop) in Analog Mode

<0.1 nm

Holding Force (passive)

>50 N

Push Force (Active)

30 N

Pull Force (Active)

30 N

Stiffness in Motion Direction

15 N/µm

Max. Operating Voltage

±250 V

Recommended Controller



Alignment in high magnetic fields
Beamline / cavity tuning


Quality control in the semiconductor industry

Semiconductor manufacturing


·  Z, Tip, Tilt platform with NEXLINE

·  Dimensional Drawing

·  Back View



© 1996-2018 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.