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 All Categories    Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology > Item # P-780.00
 

Item # P-780.00, Miniature Piezo Nanopositioning/Scanning Stage with Direct Metrology


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  • Fast Response (1 kHz Resonant Frequency)
  • Stainless Steel Construction
  • Frictionless Precision Flexure Guiding System
  • 80 µm Travel Range
  • Direct Metrology with LVDT Sensor
  • Resolution <5 nm
  • PICMA® High-Performance Multilayer Piezo Drives





 Specifications   

Active Axes

X

Open Loop Resolution

1.00 nm

Max. Normal Load

10 N

Travel Range

80 µm

Stiffness

1.5 N/µm ±20%

Push Force Capacity (in Operating Direction)

50 N

Pull Force Capacity (in Operating Direction)

5 N

Lateral Force Limit

10 N

Lateral Runout (X/Y/Z) (typ.)

10 nm

Electrical Capacitance

3.0 µF ±20%

Dynamic Operating Current Coefficient (DOCC)

View
4.7 µA/(Hz x µm)

Unloaded Resonant Frequency

1 kHz

Resonant Frequency at 100 g Load

600 Hz ±20%

Operating Temperature Range

-20 to +80 °C

Voltage Connection

VL

Weight (with Cables)

150 g ±5%

Body Material

N-S

Recommended Amplifier / Controller

G, C

Application

Biotechnology
Disk drive testing

Fiber optics

Metrology

Micromanipulation

Nanopositioning

Scanning interferometry

Scanning microscopy


 MORE IMAGES 

·  Dimensional Drawing

·  Wire EDM cutting process


 DOWNLOADS 

Description/Datasheet




© 1996-2018 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.