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 All Categories    PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology > Item # P-62x.10L
 

Item # P-62x.10L, PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology


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  • Travel to 950 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions




 Specifications   

Active Axes

X

Operating Temperature Range

-40 to +150 °C

Voltage Connection

VL

Body Material

Al

Recommended Amplifier / Controller

C, G

Application

(Dynamic)interferometry
Biotechnology

Microscopy

Nanopositioning

Quality assurance

Semiconductor technology


 MORE IMAGES 

·  Dimensional Drawing

·  Rapid Scanning Motion

·  Repeatability

·  P621

·  PIHera Nanopositioning stage

·  Stacked XY Piezo Stage

·  XY piezo stage (serial kinematics)


 DOWNLOADS 

Description/Datasheet




© 1996-2018 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.