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 All Categories    PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology
All Categories > Nanopositioning: Piezo Stages,
Actuators, Piezo Controllers, Sensors
> Piezo Nanopositioning Systems > Single Axis Piezo Nanopositioning Systems > PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology > Item # P-628.1CD
 

Item # P-628.1CD, PIHera® Miniature Long-Range Piezo Nanopositioning Stages with Direct Metrology


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  • Travel to 950 µm
  • Compact Design
  • Resolution <1 nm
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions




 Specifications   

Active Axes

X

Open Loop Resolution

0.50 nm

Max. Normal Load

10 N

Travel Range

950 µm

Closed Loop Resolution

1.80 nm

Closed Loop Linearity

0.03 %

Unloaded Resonant Frequency

.125 kHz

Weight (with Cables)

375 g ±5%

Closed Loop Travel Range

800 µm

Integrated Feedback Sensor

Capacitive

Push Force Capacity (X)

10 N

Pull Force Capacity (X)

8 N

Lateral Force Limit

10 N

Tilt (θY, θZ) (typ.)

6 µrad

Electrical Capacitance

18.6 µF ±20%

Resonant Frequency at 20 g Load

115 Hz ±20%

Resonant Frequency at 120 g Load

90 Hz ±20%

Operating Temperature Range

-40 to +120 °C

Voltage Connection

D (Version .1CL with Lemo connectors)

Sensor Connection

D (Version .1CL with Lemo connectors)

Body Material

Al

Recommended Amplifier / Controller

F, M, L, HF

Application

(Dynamic)interferometry
Biotechnology

Microscopy

Nanopositioning

Quality assurance

Semiconductor technology


 MORE IMAGES 

·  Dimensional Drawing

·  Rapid Scanning Motion

·  Repeatability

·  P621

·  PIHera Nanopositioning stage

·  Stacked XY Piezo Stage

·  XY piezo stage (serial kinematics)


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Description/Datasheet




© 1996-2018 PI (Physik Instrumente) GmbH & Co. KG. All rights reserved. Specifications subject to change without notice.