• 10 & 25 mm Travel Range
• 0.05 µm Minimum Incremental Motion
• Non-Rotating Tip
• Velocity to 2 mm/sec.
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Origin and Limit Switches
• Front Mount or Clamp Mount
• >5,000 Hours MTB

• 10, 25 & 50 mm Travel Ranges
• 0.05 µm Minimum Incremental Motion
• Non-Rotating Tip
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Sub-nm Resolution with Optional PZT Drive
• >5,000 Hours MTBF

Suitable for a high number of cycles

Travel ranges 13 to 77 mm (1/2" to 3")

DC or stepper motor

Vacuum-compatible versions to 10^-9 hPa on request

Reference-class linear drive
Combines high precision, high forces, and high dynamics. Versions available for vacuum environments to 10^-9 hPa.

High-quality components
Ball screw for smooth feed. Nonrotating tip for uniform motion prevents wobble, torque, and wear at the point of contact. Incl. flat and spherical tip for decoupling forces. Noncontact limit switches protect the mechanics. A direction-sensing reference switch supports automation applications. Position-controlled variants with differential encoder driver in the connector for safe signal transfer over distances up to 10 m.

Application fields
Research. Automation. Optical alignment.

• 17 mm Travel Range
• 0.1 µm Minimum Incremental Motion
• Velocity up to 2.5 mm/sec.
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit and Origin Switches
• Fits M-105 & F-110 Fiber Aligners
• >5,000 Hours MTBF

• Alternative for Standard Micrometer Drives
• Manual Travel to 18 mm
• Piezoelectric High-Resolution Travel to 25 µm
• Sub-Nanometer Resolution
• Dynamic Operation to 10 Hz

Compact and particularly inexpensive

Direct drive versions include handwheel

Noncontact limit and reference point switches

Compact standard-class linear drive
Stepper mike with 2-phase stepper motor as powerful direct drive, or slim design version with gearhead motors.

High-quality components
Nonrotating end piece for uniform motion prevents wobble, torque, and wear at the point of contact. Noncontact limit switches protect the mechanical system. A direction-sensing reference point switch supports automation applications. Integrated position indicator. Versions with direct drive include handwheel for manual adjustment.

Inexpensive system solution
In conjunction with the networkable C-663.12 Mercury Step single-channel controller, the linear actuators offer good performance at an economically attractive system price for single-axis and multi-axis configurations.

• 20 mm or 50 mm Travel Range
• 0.1 µm Minimum Incremental Motion
• High-Speed Direct Drive Option
• 120 N Push/Pull Load
• 100 N Lateral Load Limit
• Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit & Origin Switches
• >20,000 Hours MTBF
• Vacuum Versions

Minimum dimensions, high forces, stable positioning

Compact design

Self-locking, no heat generation at rest

Linear actuator with piezo motors
Linear screw-type actuator with piezo inertia drive for high-resolution and stable positioning.

Alignment of mechanical and optomechanical components
Stable adjustment in optical paths. Long-term positioning: High stability at target position, reliable startup even after longer downtimes. High holding force and resolution by combining piezo actuators with mechanical thread translation.

Piezo motors
Compact, inexpensive inertia drive principle (stick-slip). The drive is self-locking at rest, requires no current, and does not generate any heat. It holds the position with maximum force.

With position sensor for closed-loop operation

Compact design with integrated incremental encoder

Self-locking at rest even when closed-loop control is switched off

Inertia drive
Compact, inexpensive inertia drive principle (stick-slip). At rest, the drive is self-locking, requires no current, and does not generate any heat. It holds the position with maximum force.

Alignment of mechanical and optomechanical components
Stable alignment of optical paths. Long-term positioning stability: High stability at target position, reliable startup even after longer downtimes. High holding force and resolution by combining piezo actuators with mechanical thread translation. Vacuum-compatible versions to 10-6 hPa available.

Integrated position sensor
An incremental encoder measures the relative motion to a freely definable reference position. In conjunction with the E-871 motion controller, the encoder resolution is up to <1 nm.

Compact design

Linear actuator with piezo motors
Linear screw-type actuator with piezo inertia drive for high-resolution and stable positioning. Open-loop operation in full-step mode.

Alignment of mechanical and opt mechanical components
Stable adjustment in optical paths. Long-term positioning: High stability at target position, reliable startup even after longer downtimes. High holding force and resolution by combining piezo actuators with mechanical thread translation. Vacuum-compatible to 10^-9 hPa.

Piezo motors
Compact, inexpensive inertia drive principle (stick-slip). The drive is self-locking at rest, requires no current, and does not generate any heat. It holds the position with maximum force.