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 All Categories    Ceramic Linear Motors: PILine Ultrasonic Motors, Nexline PiezoWalk Nano-Drivers
All Categories > Micropositioning:
Motorized Stages, Hexapods, Controllers
> Ceramic Linear Motors: PILine Ultrasonic Motors, Nexline PiezoWalk Nano-Drivers
 
 

Ceramic Linear Motors: PILine Ultrasonic Motors, Nexline PiezoWalk Nano-Drivers


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Product Image - PILine Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

PILine® Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

(2)
  • 50 mm Travel
  • Low-Profile, only 26.5 mm
  • Velocity to 400 mm/s
  • Acceleration to 20 g
  • 0.1 µm Linear Encoder (Direct-Motion Metrology)
  • Auto Lock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions to 10-8 hPa Available
Product Image - PILine Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs

PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs


  • Smallest High Speed Linear Motor
  • Patented Principle Features Very Compact Dimensions
  • Velocity to 600 mm/s
  • Acceleration to 15 g
  • Minimum Incremental Motion to 0.05 µm
  • Self-Locking to 1.5 N
  • 20000 h MTBF
Product Image -  PILine Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

(2)
  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel Range
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 µm
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available
Prodcut Image - NEXLINE Miniature High-Load Piezo Nanopositioning Drive

NEXLINE® Miniature High-Load Piezo Nanopositioning Drive


  • Winner of the SEMI Technology Innovation Showcase Award
  • 3 mm Travel Range
  • <0.1 nm Resolution (Open-Loop)
  • Active Force Generation to 30 N
  • >50 N Holding Force Self-Locking
Product Image - EXLINE High-Load Piezo Nanopositioning Drive

NEXLINE® High-Load Piezo Nanopositioning Drive

(2)
  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 mm Travel Range, <0.1 nm Resolution (Open-Loop)
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >600 N Holding Force, Self-Locking
Product Image - PILine Miniature Translation Stages with Ultrasonic Piezo Linear Motors

PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors

(2)
  • Smallest Translation Stage with High-Speed Linear Motor Drive
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 nm
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa


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